diff --git a/arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml b/arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml
new file mode 100644
index 00000000..d99abe12
--- /dev/null
+++ b/arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml
@@ -0,0 +1,5 @@
+[esf.links]
+common = "arch/arm/common"
+mcu = "arch/arm/SAMD51/SAMD51A/mcu"
+ld = "arch/arm/SAMD51/SAMD51A/ld"
+cfg = "arch/arm/SAMD51/SAMD51A/manifest"
diff --git a/manifest/make-manifest.toml b/manifest/make-manifest.toml
index 164d6a99..327547ea 100644
--- a/manifest/make-manifest.toml
+++ b/manifest/make-manifest.toml
@@ -195,11 +195,81 @@ OBJS = ["ESF/mcu/src/startup_samd21j18a.o",
 OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd21j18a.o$(QUOTE)",
              "$(QUOTE)ESF/mcu/src/system_samd21j18a.o$(QUOTE)"]
 
+[arch.arm.samd51a]
+MCPU = "cortex-m4"
+FPU = "fpv4-sp-d16"
+FLOAT_ABI = "hard"
+[arch.arm.samd51a.samd51g18a]
+MCU = "__SAMD51G18A__"
+LD_SCRIPT = "$(LD_PATH)/samd51g18a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51g18a.o",
+     "ESF/mcu/src/system_samd51g18a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51g18a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51g18a.o$(QUOTE)"]
+[arch.arm.samd51a.samd51g19a]
+MCU = "__SAMD51G19A__"
+LD_SCRIPT = "$(LD_PATH)/samd51g19a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51g19a.o",
+     "ESF/mcu/src/system_samd51g19a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51g19a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51g19a.o$(QUOTE)"]
+
+[arch.arm.samd51a.samd51j18a]
+MCU = "__SAMD51J18A__"
+LD_SCRIPT = "$(LD_PATH)/samd51j18a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51j18a.o",
+     "ESF/mcu/src/system_samd51j18a.o"]
+OBJS_AS_ARJS = ["$(QUOTE)ESF/mcu/src/startup_samd51j18a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51j18a.o$(QUOTE)"]
+[arch.arm.samd51a.samd51j19a]
+MCU = "__SAMD51J19A__"
+LD_SCRIPT = "$(LD_PATH)/samd51j19a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51j19a.o",
+     "ESF/mcu/src/system_samd51j19a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51j19a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51j19a.o$(QUOTE)"]
+[arch.arm.samd51a.samd51j20a]
+MCU = "__SAMD51J20A__"
+LD_SCRIPT = "$(LD_PATH)/samd51j20a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51j20a.o",
+     "ESF/mcu/src/system_samd51j20a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51j20a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51j20a.o$(QUOTE)"]
+
+[arch.arm.samd51a.samd51n19a]
+MCU = "__SAMD51N19A__"
+LD_SCRIPT = "$(LD_PATH)/samd51n19a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51n19a.o",
+     "ESF/mcu/src/system_samd51n19a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51n19a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51n19a.o$(QUOTE)"]
+[arch.arm.samd51a.samd51n20a]
+MCU = "__SAMD51N20A__"
+LD_SCRIPT = "$(LD_PATH)/samd51n20a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51n20a.o",
+     "ESF/mcu/src/system_samd51n20a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51n20a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51n20a.o$(QUOTE)"]
+
+[arch.arm.samd51a.samd51p19a]
+MCU = "__SAMD51P19A__"
+LD_SCRIPT = "$(LD_PATH)/samd51p19a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51p19a.o",
+     "ESF/mcu/src/system_samd51p19a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51p19a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51p19a.o$(QUOTE)"]
+[arch.arm.samd51a.samd51p20a]
+MCU = "__SAMD51P20A__"
+LD_SCRIPT = "$(LD_PATH)/samd51p20a_flash.ld"
+OBJS = ["ESF/mcu/src/startup_samd51p20a.o",
+     "ESF/mcu/src/system_samd51p20a.o"]
+OBJS_AS_ARGS = ["$(QUOTE)ESF/mcu/src/startup_samd51p20a.o$(QUOTE)",
+             "$(QUOTE)ESF/mcu/src/system_samd51p20a.o$(QUOTE)"]
 
 [arch.arm.same54a]
 MCPU = "cortex-m4"
 FPU = "fpv4-sp-d16"
-FLOAT_ABI = "softfp"
+FLOAT_ABI = "hard"
 [arch.arm.same54a.same54n19a]
 MCU = "__SAME54N19A__"
 LD_SCRIPT = "$(LD_PATH)/same54n19a_flash.ld"
diff --git a/manifest/target-manifest.toml b/manifest/target-manifest.toml
index b7e4d6ea..49e75c08 100644
--- a/manifest/target-manifest.toml
+++ b/manifest/target-manifest.toml
@@ -52,6 +52,17 @@ samd21j15a = "arch/arm/SAMD21/SAMD21A/manifest/samd21a.toml"
 samd21j16a = "arch/arm/SAMD21/SAMD21A/manifest/samd21a.toml"
 samd21j17a = "arch/arm/SAMD21/SAMD21A/manifest/samd21a.toml"
 samd21j18a = "arch/arm/SAMD21/SAMD21A/manifest/samd21a.toml"
+# samd51 family
+# samd51a series
+samd51g18a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51g19a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51j18a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51j19a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51j20a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51n19a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51n20a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51p19a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
+samd51p20a = "arch/arm/SAMD51/SAMD51A/manifest/samd51a.toml"
 # same54 family
 # same54a series
 same54n19a = "arch/arm/SAME54/SAME54A/manifest/same54a.toml"
@@ -60,12 +71,12 @@ same54p19a = "arch/arm/SAME54/SAME54A/manifest/same54a.toml"
 same54p20a = "arch/arm/SAME54/SAME54A/manifest/same54a.toml"
 # same70 family
 # same70a series
-same70j19 = "arch/arm/SAME70/SAME70A/manifest/same70j19a.toml"
-same70j20 = "arch/arm/SAME70/SAME70A/manifest/same70j20a.toml"
-same70j21 = "arch/arm/SAME70/SAME70A/manifest/same70j21a.toml"
-same70n19 = "arch/arm/SAME70/SAME70A/manifest/same70n19a.toml"
-same70n20 = "arch/arm/SAME70/SAME70A/manifest/same70n19a.toml"
-same70n21 = "arch/arm/SAME70/SAME70A/manifest/same70n20a.toml"
-same70q19 = "arch/arm/SAME70/SAME70A/manifest/same70q21a.toml"
-same70q20 = "arch/arm/SAME70/SAME70A/manifest/same70q20a.toml"
-same70q21 = "arch/arm/SAME70/SAME70A/manifest/same70q21a.toml"
+same70j19a = "arch/arm/SAME70/SAME70A/manifest/same70j19a.toml"
+same70j20a = "arch/arm/SAME70/SAME70A/manifest/same70j20a.toml"
+same70j21a = "arch/arm/SAME70/SAME70A/manifest/same70j21a.toml"
+same70n19a = "arch/arm/SAME70/SAME70A/manifest/same70n19a.toml"
+same70n20a = "arch/arm/SAME70/SAME70A/manifest/same70n19a.toml"
+same70n21a = "arch/arm/SAME70/SAME70A/manifest/same70n20a.toml"
+same70q19a = "arch/arm/SAME70/SAME70A/manifest/same70q21a.toml"
+same70q20a = "arch/arm/SAME70/SAME70A/manifest/same70q20a.toml"
+same70q21a = "arch/arm/SAME70/SAME70A/manifest/same70q21a.toml"